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Office of Research and Innovation

Nanofabrication Facility

The NC State Nanofabrication Facility provides users with a broad range of nanofabrication capabilities to support a diverse set of projects.

Equipment

  • 4″ E-Beam Evaporator
  • AGILENT N4691B-00F
  • ALIGLENT E5071C ENA NETWORK AN
  • ANTENNA SHIELD ROOM
  • CB15 Motor Assembly
  • CHA MK-50 E-Beam Evaporator
  • CHILLER, AIR CONDITIONING
  • Custom Spin-Chuck
  • DEKTAK
  • DektakXT SP Measuring System
  • Dell Precision 7910- ISLINGTON
  • Dicing Saw Machine
  • DOUBLE STACKED SPIN DRYER/SILI
  • Dry Vacuum Pump
  • Dual Ion Beam System
  • Edwards iQDP-80 Dry Pump
  • Edwards iQDP40 Pump System
  • EVAPORATION/DC SPUTTERING SYST
  • EXPAND TOXIC GAS MONITORING SY
  • Filmetrics System, Used
  • FSM 128NT, Refurbished
  • FURNACES, LABORATORY
  • Glovebox without Gas Purifier
  • Heated Teflon Bath
  • HEATING RECIRCULATOR
  • HEATPULSE 610T RAPID THERMAL P
  • Heidelberg PG 101
  • HELIUM LEAK DETECTOR, KF 25 IN
  • Hitachi FlexSEM 1000II
  • JANDEL RM3-AR TEST METER
  • LABORATORY EQUIPMENT, MINI TRA
  • LABORATORY EQUIPMENT, TRACK SY
  • Lasair III 110 Aerosol Particl
  • Low Custom Chuck
  • LPKF ProtoLaser R4
  • M-2000 DI Ellipsometer
  • MASK ALIGNER MA6
  • MASS FLOW CONTROLLER
  • MetPrep 1X Precision Grinder
  • MJB3 ALIGHNER
  • MULTIPLIER DETECTOR S/W
  • NANO ENABLER SYSTEM
  • NT 9100 Optical Profiling Syst
  • Plasma ALD System
  • Plasma Lab
  • PLASMA SYSTEM
  • PlasmaPro 100 Cobra, Used
  • PLASMOD Plasma System
  • PLC GAS SYSTEM
  • Pro BGP80 RIE Ion Etch System
  • PROCESS TUBE,QUARTZ
  • PUMP, CRYO-TORR
  • QUADREX ELECTRON MULTIPLIER/
  • Quadruple Gas Analyzer
  • QUARTZ LINERS and BOATS FOR LPCV
  • Rath 150-Two
  • REACTIVE ION ETCH SYS
  • RF ABSORBER
  • RINSER/DRYER,DOUBLE STACK SPIN
  • RITE TRACK KIT-6″
  • ROTOR, 4 BOLT TO HOLD EMPAK CA
  • SINGLE WAFER SPIN PROCESS
  • SPINNER ASSY
  • SUSS PSM6 PROBE STATION
  • SYLUS PROFILOMETER
  • THERMCO BRUTE AMERICAN-XL FURN
  • Thin Film Measurement System
  • THROTTLE VALVE,GENERATOR
  • TMP361C Turbo Pump
  • Turbo Bypass Valve
  • TURBO PUMP
  • TURBOMOLECULAR DRAG COMBINATIO
  • UPGRADE PROGRAMMABLE CONTROLLE
  • VacuTech Plasma PECVD System
  • VACUUM SUB-ASSEMBLY-LOAD LOCK
  • WAFER BACKLAPPING FILM REMOVER
  • WAFER TAPE APPLICATOR
  • WET PROCESSING STATION
  • X20 PLC Controller System
  • Yield Engineering YES 58 Oven

Contact

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Unit

  • Center For Adv Electronic Mat